High Precision Manipulator HPM 100
UHV Manipulator HPM-100
The HPM High Precision Manipulators are mounted on a DN 160CF flange and come with XY-strokes of 12.5 mm and 25 mm (full square range) respectively, and up to 1000 mm Z-Stroke.
Motion is possible via large barrel types micrometers with 5 microns graduations. These are easily interchangeable with stepper motor modules, while manual operation is still possible with removed motors.
